http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2358256-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2000-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b0528a8ae6ad84bf0d1255548c1110 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47dfc59ffde831488f20bdcd86fb640a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b36d5bfe2e6c486590f546177af97b6 |
| publicationDate | 2001-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2358256-A |
| titleOfInvention | Chemically amplified positive resist composition |
| abstract | A chemically amplified positive resist composition<BR> comprises<BR> a resin (X) which has polymeric unit (a) derived from dihyroxyl-1-adamantyl (meth)acrylate and a polymeric unit (b) derived from 2-alkyl-2-adamantyl (meth)acrylate, and which, per se, is insoluble or slightly soluble in alkali but becomes soluble in alkali due to the action of acid; and an acid generating agent (Y). Polymeric unit (a) can be derived from 3,5-dihydroxy-1-adamantyl (meth)acrylate. The resin (X) can further have a polymeric unit derived from (meth)acryloyloxy-gamma-butyrolactone. The composition is suitable for use in an exposure process utilizing an ArF excimer laser and is capable of forming a resist coat exhibiting a high hydrophilicity; is excellent in adhesion to a substrate and satisfactory in resist performance characteristics. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2373866-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2373866-B |
| priorityDate | 1999-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 160.