http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9514954-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 2014-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_688e0bca8de0ef62db714be9c779a5a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a6942fbca45d5c1b1b0f5b87e5b2f69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e424095cf4e1ccd058ab686de144e1b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fe28f320aef5e0a080090dcee20e67a |
| publicationDate | 2016-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9514954-B2 |
| titleOfInvention | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films |
| abstract | Methods and apparatus for treating an organic film such as photoresist with a hydroxyl-generating compound prior to removing the organic film from a substrate are provided. Treatments include exposure to one or more of hydrogen peroxide vapor and water vapor in a non-plasma environment. In some implementations, conditions are such that condensation on the surface is suppressed. Methods include treating high-dose ion-implantation photoresists and post-plasma doping photoresists with little or no material loss and permit mild plasma removal of the photoresist after treatment. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9941108-B2 |
| priorityDate | 2014-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 262.