patent/US-5911834-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5911834-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45572 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
filingDate	1996-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ee1afc152e0665817c3f4c28d80799c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1abcb2ae70c8fecd4791bf228b25942d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_603ac6e3d8bd3e55b34f75efbe3be253
publicationDate	1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5911834-A
titleOfInvention	Gas delivery system
abstract	The present invention provides a method and apparatus for delivering one or more process gases and one or more cleaning gases into one or more processing regions. The gas distribution system includes a gas inlet and a gas conduit, each disposed to deliver one or more gases into the chamber via a desired diffusing passage. Also, a gas delivery method and apparatus for splitting a gas feed into multiple feed lines is provided having a gas filter disposed upstream from a splitting coupling disposed in the line.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007062449-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8951347-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011029268-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005158469-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8591661-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8444869-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8150646-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6797108-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109075023-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9373497-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9053909-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0104937-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004200413-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7115508-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004149213-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004109946-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003198740-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6527865-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8721790-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11236424-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018163306-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8193096-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8058181-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6258170-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6562141-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6494670-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011214611-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010300359-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7910897-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6179924-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011143551-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6545245-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011100489-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011143548-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9947562-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7424894-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435895-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0104937-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7700486-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7374795-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012031330-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7927425-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008042077-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005250348-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007041763-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9139933-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011139074-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010055320-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627169-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9514954-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0245561-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009206056-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021335635-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0245561-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7655092-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011126985-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626303-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6586343-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9289795-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9087671-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011305544-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011139175-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6911091-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011031214-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004040503-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749549-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6635115-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004040502-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006276054-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015101535-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8770143-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008248656-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009056875-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8129281-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8641862-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7143774-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005241698-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6508913-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9564344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6595623-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009053901-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004200529-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8721797-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008295771-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617347-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005150452-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8113143-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007107783-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004237892-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7112541-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015129759-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6941965-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7273823-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010075488-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9941108-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8716143-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007020475-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7360551-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6606802-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109075023-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6340281-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7217326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6235656-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8845857-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6752166-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9616457-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6333272-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6250869-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8058178-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7006888-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227499-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006021574-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018108-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011209663-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003010289-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9613825-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6533867-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6486444-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8746170-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8967081-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012211473-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10576491-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008314312-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6071055-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6056823-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022316093-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010055347-A1
priorityDate	1996-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5363872-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23676225 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222536 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452193847 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419595927

Total number of triples: 159.