| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d193a819b51d37bb16c51f6002c04e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_411238d3308d8c03a10dceb28950724e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28c02fb6d82bac63b9e2382dfcfac23e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aaa6c173c3968f221d9dd632012c22cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_419453226188e2cbcb01841385b32696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98e8da7b069663e5d3426a659d16f705 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-564 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00 |
| filingDate |
2013-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_807070685988805afb374d1638454449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24d1ff587bad13f87af577c3c4cbc488
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9477a648496bdd4733e18efe95f21b80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58f3798b3977e930ea3d525141157c66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c41b4196939b1bb7dd7cdedf4fb808a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dde4d52d335f68177cd0a4c52de0fd5d |
| publicationDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8952373-B2 |
| titleOfInvention |
Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns |
| abstract |
A hardmask composition includes a monomer represented by the following Chemical Formula 1 and an aromatic ring-containing polymer, |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9556094-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015274622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10345706-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015008212-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015001178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9359276-B2 |
| priorityDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |