| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5bd63764195b7822d28496f9358f8d6a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2009-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78fb873d2d0bbd371fdda6f232ab4aa9 |
| publicationDate |
2012-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8236381-B2 |
| titleOfInvention |
Metal piperidinate and metal pyridinate precursors for thin film deposition |
| abstract |
Methods and compositions for depositing a film on one or more substrates include providing a reactor and at least one substrate disposed in the reactor. At least one lanthanide precursor is provided in vapor form and a lanthanide metal thin film layer is deposited onto the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10329312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10403494-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10913754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9777025-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11780859-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649560-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9920078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11274112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10752645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015013630-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9382269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9663546-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10494387-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016525550-A |
| priorityDate |
2008-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |