| abstract |
Compounds and oligomers of the compounds were synthesized using a cyclic amine ligand bonded to a metal atom. These compounds are useful for the synthesis of metal-containing materials. Examples include pure metals, metal alloys, metal oxides, metal nitrides, metal phosphides, metal sulfides, metal selenides, metal tellurides, metal borides, metal carbides, metal silicides and metal germanides. Techniques for material synthesis include vapor deposition methods (chemical vapor deposition and atomic layer deposition), liquid solution methods (sol-gel and precipitation) and solid state pyrolysis methods. Suitable applications include electrical wiring in microelectronics and magnetoresistive layers in magnetic information storage devices. The film has a very uniform thickness and high step coverage in narrow holes. |