http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7247419-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00 |
filingDate | 2005-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_115725e452e53e63ed2fdd936e2563c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37c55c48d1cf96bcf26cf36f7af42a0e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cfe25c9354f65b1f094b68db2fc948b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cfa284e07dda337bb27125e4456ad94 |
publicationDate | 2007-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-7247419-B2 |
titleOfInvention | Nanocomposite photosensitive composition and use thereof |
abstract | The present invention relates to a photoresist composition suitable for image-wise exposure and development as a negative photoresist comprising a negative photoresist composition and an inorganic particle material having an average particle size equal or greater than 10 nanometers, wherein the thickness of the photoresist coating film is greater than 5 microns. The negative photoresist composition is selected from (1) a composition comprising (i) a resin binder, (ii) a photoacid generator, and (iii) a cross-linking agent; or (2) a composition comprising (i) a resin binder, (ii) optionally, addition-polymerizeable, ethylenically unsaturated compound(s) and (iii) a photoinitiator; or (3) a composition comprising (i) a photopolymerizable compound containing at least two pendant unsaturated groups; (ii) ethylenically unsaturated photopolymerizable polyalkylene oxide hydrophilic compound(s); and (iii) a photoinitiator. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012301823-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8603728-B2 |
priorityDate | 2005-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 960.