| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-117 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 |
| filingDate |
2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_299e1c4c0b7bf8cc7c15fbe60484a73a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac0b730324a14a4a5762cad7836ee81d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb1886fb68d2d0f952960e45a9719cca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38e74915e37e73ac7e6f9fcfad28d123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aeac862c717c566a0b8f383c71437922 |
| publicationDate |
2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004175653-A1 |
| titleOfInvention |
Photosensitive composition and use thereof |
| abstract |
A composition that comprises a photopolymerizable compound containing at least two pendant unsaturated groups; at least one ethylenically unsaturated photopolymerizable polyalkylene oxide hydrophilic monomer; at least one nonionic surfactant; and at least one photoinitiator is provided. The composition also preferably contains at least one amine modified acrylic oligomer and a dye. Other conventional photoresist components such as photosensitizers, adhesion promoters, leveling agents and solvents may also be included in the composition. Such compositions are useful for forming a pattern on a substrate, such as patterning microlithographic circuits on a substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7524606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10705424-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9512242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11762292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008008957-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7247419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006228645-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006228644-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015153647-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9110371-B2 |
| priorityDate |
2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |