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publicationDate 2003-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6653043-B1
titleOfInvention Active particle, photosensitive resin composition, and process for forming pattern
abstract Active particles which when incorporated into a photosensitive composition containing base resin and diazonium-series photosensitizer provide improvement in at least one or both of sensitivity and resolutionn. The active particles include a particulate carrier, such as silica sol, and an aromatic unit directly or indirectly bonded to the carrier. The aromatic unit has a phenolic hydroxyl group and no substituent in at least one of the o- and p-positions, in relation to the phenolic hydroxyl group. The active particles, when incorporated into the photosensitive composition can, after exposure, increase solubility difference between the exposed and non-exposed areas.
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