http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6986975-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d21cbff64022f95c237c0bd3ec8656ca
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2035-0827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S101-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2043-025
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C43-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C37-0053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C37-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C35-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
filingDate 2004-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2006-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6f1ea560d5efcb3f4b525ce9593f1d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27794961592e8bf381725e2db3a5aeec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c590fede78b074d445a935c18ab46b7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d63431f3e47e99548eba8ac27bf609d7
publicationDate 2006-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6986975-B2
titleOfInvention Method of aligning a template with a substrate employing moire patterns
abstract The present invention includes a method of determining an alignment between a substrate and a template spaced-apart from the substrate and having a distance defined therebetween, the substrate having a first pattern disposed thereon and the template having a second pattern disposed thereon, the method including, sensing the first and the second pattern, with the distance being established such that the first and the second pattern form a desired moiré pattern when the template and the substrate are in a desired spatial relationship.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009014917-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8105736-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006114450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231421-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009115110-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007262936-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005270312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7229273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009026657-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985530-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007287081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7837907-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009037004-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010015270-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009169662-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8529778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8142850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8012394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011171340-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009130598-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009233244-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8556616-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7768624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010078846-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010098859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009147237-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006063359-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010278955-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7785526-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7880872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8366434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7612882-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007122942-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010095862-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7780893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010102487-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009166933-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010102029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877073-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009023074-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008090312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7630067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005064344-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008094629-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010109194-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7535549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7906274-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004168586-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010120251-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10935884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009212012-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8586126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008070481-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE47483-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8237133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7205244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8345242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9122148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007228608-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8253941-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005271955-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11037785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010090130-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670530-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008199816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009073206-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007170617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7785096-B2
priorityDate 2000-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5527662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4921778-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6391798-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5376810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329256-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6632742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4931351-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5453157-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5198326-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5458520-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4507331-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5895263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6696220-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6150680-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6455411-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5736424-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5324683-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5948219-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4426247-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5173393-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5431777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5071694-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4908298-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5468542-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5053318-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6514672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6677252-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5212147-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5362606-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5374454-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5439766-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4552833-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5169494-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5380474-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5240878-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4999280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4737425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4808511-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6635581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5366851-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4657845-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5234793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4919748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4692205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4119688-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6387783-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4826943-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5417802-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4707218-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5330881-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6245581-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5948570-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6383928-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5244818-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5314772-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5108875-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4201800-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5700626-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4964945-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5318870-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92323602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433323431
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128921711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123578
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457277700
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53710490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127594997

Total number of triples: 173.