http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4999280-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 1989-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1991-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1a1f18a70f5c9589c6c2b15b0619387
publicationDate 1991-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4999280-A
titleOfInvention Spray silylation of photoresist images
abstract Photoresist images are made resistant to reactive ion etching by treating them with a poly(dimethylsilazane).
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6294314-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003235787-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7906180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6908861-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7179396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7037639-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6916585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6916584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010040838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004124566-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6902853-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010308015-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5262282-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7452574-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008199816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005187339-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004112153-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004112861-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005192421-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7027156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6900881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005084804-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005274219-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005275311-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7019819-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004104641-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004197710-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7811505-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5234793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004089979-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7136150-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005160934-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6871558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006121141-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006121728-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005067379-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5578360-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004256764-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5702767-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004168613-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6842229-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6986975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7077992-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8084186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7122079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8211214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6980282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8076386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004022888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009037004-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7098572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6964793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7396475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008141862-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006145398-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6954275-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004053146-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5985524-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7252715-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6955868-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004211754-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004209177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009253080-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7090716-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010183851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5667920-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004009673-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7070405-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005276919-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004038552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002094496-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6624083-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004188381-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002093122-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5948484-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004189996-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004241324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7060324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6929762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004065976-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6932934-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004170771-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7060402-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004170770-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004168588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7281919-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010203299-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003215577-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6926929-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6919152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7071088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005072755-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003205657-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6921615-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005089774-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE38282-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349241-B2
priorityDate 1989-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4770977-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4587205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4751170-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4782008-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4599243-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4678688-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4770974-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4552833-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0198215-A2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393787
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127900651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128291256
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22572488
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123189902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15153141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID589711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129436739
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123512739
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57204623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129940999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127922959
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128585769

Total number of triples: 139.