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publicationDate 2003-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6660134-B1
titleOfInvention Feedthrough overlap coil
abstract A coil for inductively coupling RF energy to a plasma in a substrate processing chamber has adjacent spaced and circumferentially overlapping RF feedthroughs adjacent to overlapping ends to improve uniformity of processing of the substrate.
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