| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1eb9cd2af2f87dcf20b0fbbdfe79996e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1047 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02359
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76813
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2001-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34afcda25acaa1db478e04dfc14a014d |
| publicationDate |
2003-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6566243-B2 |
| titleOfInvention |
Dielectric layer including silicalite crystals and binder and method for producing same for microelectronic circuits |
| abstract |
A two-component porous material including small silicalite crystals in a porous binder provides a low dielectric constant material useful as an insulating layer in microelectronic devices. The silicalite/binder porous material uses silicalite nanocrystals smaller than the characteristic dimensions of the features on the integrated circuit device. The binder is an amorphous porous material that links the silicalite nanocrystals together, formed from a precursor which polymerizes on heating. The silicalite nanocrystals are supplied as a colloidal suspension or slurry. The slurry and binder precursor are spincoated onto a substrate and thermally treated to polymerize the binder precursor and drive off solvent in the slurry, forming the porous silicalite/binder material. The silicalite/binder porous material is readily integrated into standard damascene fabrication processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007228568-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7109130-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008122101-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010200990-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7294453-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004137728-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004140521-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7439605-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003186168-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003186169-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7256127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7262477-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004161922-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038518-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8212338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006197151-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7727907-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8409511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005255710-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7163780-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005282401-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8288295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005109475-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005109475-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6998148-B1 |
| priorityDate |
2000-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |