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publicationDate 2000-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6117000-A
titleOfInvention Polishing pad for a semiconductor substrate
abstract A polishing pad for polishing a semiconductor wafer which includes an open-celled, porous substrate having sintered particles of synthetic resin. The porous substrate is a uniform, continuous and tortuous interconnected network of capillary passage. The pad includes a bottom surface that is mechanically buffed to improve the adhesion of an adhesive to the pad bottom surface.
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