| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_340649364548937a01cef840349f4fca |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-07 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-16 |
| filingDate |
2004-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4624f5bb8e9e8d6a981d819cbe1ceae4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_441cfefa72c6fe88a4983043caead836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95a394462984ef1bcffc5ea6bd49bd60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c72016b131f0cd6025890c7815d43fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03f4a895f7dcf0174ab66fb033fd7108 |
| publicationDate |
2006-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7141155-B2 |
| titleOfInvention |
Polishing article for electro-chemical mechanical polishing |
| abstract |
A polishing pad or other shaped article for the electrochemical mechanical polishing (ECMP) of a workpiece. The article includes an electrically-conductive compound which is formed into a layer. The compound is formulated as an admixture which includes a polymeric component forming a continuous phase in the layer, and an electrically-conductive filler component forming a discrete phase within the continuous phase. With the workpiece and the layer being electrically connected and with an electrical bias being applied between the workpiece and the layer, the bias being capable of activating an electrochemical reaction, the compound exhibits an overpotential for the activation of the reaction greater than the bias. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015183081-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008047205-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011287698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7972396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9950405-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015068680-A1 |
| priorityDate |
2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |