| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2748ce90b744bc87f0f6fdb29e903324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D13-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-34 |
| filingDate |
2007-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c7aa7fb6c9df58595ca96fba975f6fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a77944237c165ba11f82052fbdedbe7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_641ffc0cc5da0fbbfdefeb07a4685f5a |
| publicationDate |
2011-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7972396-B2 |
| titleOfInvention |
Method of producing polishing pad |
| abstract |
The present invention relates to a method of producing a polishing pad, comprising steps of: (a) providing a base material comprising a plurality of fibers; said base material having a surface for polishing a substrate, wherein the fibers comprise a core and a cladding surrounding the core, and the cladding comprises a hydrophobic polymer; (b) impregnating the surface of the base material with an elastomer solution; (c) coagulating the elastomer impregnated in the surface of the base material to mold the elastomer and to form a plurality of first continuous pores between the elastomer, and between the elastomer and the fibers; (d) planarizing the surface of the base material; (e) impregnating the surface of the base material and elastomer obtained in the step (d) with a condition polymer solution; and (e) curing the condition polymer impregnated in the surface of the base material and elastomer and partially filling the condition polymer into the first continuous pores to form a plurality of second continuous pores. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9233452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11383352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10786884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015099440-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10926378-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8998678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8998677-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9199354-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9604339-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11691241-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9011207-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9039488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9409279-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8540785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8845394-B2 |
| priorityDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |