| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2748ce90b744bc87f0f6fdb29e903324 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D13-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-30 |
| filingDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a77944237c165ba11f82052fbdedbe7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c7aa7fb6c9df58595ca96fba975f6fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_641ffc0cc5da0fbbfdefeb07a4685f5a |
| publicationDate |
2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2007010175-A1 |
| titleOfInvention |
Polishing pad and method of producing same |
| abstract |
The present invention relates to a method of producing a polishing pad, comprising steps of: (a) providing a base material comprising a plurality of fibers; said base material having a surface for polishing a substrate; (b) impregnating the surface of the base material with an elastomer solution; (c) curing the elastomer impregnated in the surface of the base material to form a plurality of first continuous pores embedded in the elastomer and fibers; (d) impregnating the surface of the base material and elastomer obtained in the step (c) with a condition polymer solution; and (e) curing the condition polymer impregnated in the surface of the base material and elastomer and partially filling the condition polymer into the first continuous pores to form a plurality of second continuous pores. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9873184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9707663-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010119811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5877152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011070814-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10906154-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3597367-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8540785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103567891-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010078171-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9862071-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012117789-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11148256-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2384261-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2384261-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8343586-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018147690-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014102125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8252075-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008268227-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017050288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9975214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010162632-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100915973-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9409279-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9873182-B2 |
| priorityDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |