patent/US-6008104-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6008104-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-038
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
filingDate	1998-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1999-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebdf68386f3e877a1f1d152f2a3857f3
publicationDate	1999-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6008104-A
titleOfInvention	Method of fabricating a trench capacitor with a deposited isolation collar
abstract	An improved trench capacitor is achieved by providing a node dielectric that lines the collar and sidewalls of the bottom of the trench. Further, the trench capacitor includes a lower portion having a diameter that is substantially the about same or greater than that of the upper portion.
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priorityDate	1998-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291

Total number of triples: 138.