http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5962184-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 1996-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d29f0823005453f0bf0ff7f3d5dbd58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d29f26086ba4589c556af186b1107af
publicationDate 1999-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5962184-A
titleOfInvention Photoresist composition comprising a copolymer of a hydroxystyrene and a (meth)acrylate substituted with an alicyclic ester substituent
abstract The present invention relates to an improved chemically amplified photoresist composition comprising (i) a photosensitive acid generator and (ii) a polymer comprising the reaction product of hydroxystyrene with a monomer selected from acrylate or methacrylate having an alicyclic ester substituent.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6235446-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6737214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7807332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006122346-A9
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7510817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7250475-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003022101-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012136692-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008008956-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008044776-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002164548-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6818380-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7439302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008002402-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6280900-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7399806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006257781-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002106580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004047355-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1152295-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004042476-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6777158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6136501-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02069042-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8232040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1321351-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7375172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006134546-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7700256-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009282068-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005059787-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009282063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006217519-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9587136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6280897-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004067615-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-87210-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6849375-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007009830-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7326523-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008213697-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010143845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6077643-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6200726-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7816068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6365321-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015099109-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7517634-B2
priorityDate 1996-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5275908-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5443690-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5399647-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5660969-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5262281-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5225316-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5496678-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5212043-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5324804-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5635332-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5506088-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5419998-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5492793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5045431-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5547812-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127866417
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22725
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129618461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3680404
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID223737104
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129727256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129311648
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87595
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66704286
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127900651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127672953
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415816504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93485
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128789560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID114576
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21885
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128805973
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127786062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411296645
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415710466
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136535
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474459
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92108
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128961115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21881074
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419566679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129001376
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129496328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24153
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7146
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54143280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID223781130
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424354469
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571081
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407219005
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2758875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17836188
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2734849
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID223771151
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127867403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25188
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127421767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415854885
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75821
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415793170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412095679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128207049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7678
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10214413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412224690
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID637936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416157759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11448
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129294975
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411297156
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474491
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128246930
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12877
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291

Total number of triples: 156.