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filingDate 1997-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f07976cb3a72776daa97e5e4a9a1cce
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publicationDate 2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6077643-A
titleOfInvention Polymers and photoresist compositions
abstract The present invention provides novel polymers and chemically-amplified positive-acting photoresist compositions that contain such polymers as a resin binder component. The polymers of the invention include acid labile groups that contain isobornyl moieties and groups that contribute to aqueous development of a photoresist such as phenolic groups.
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