| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1807 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-005 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F293-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 |
| filingDate |
2004-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a087c36ccc055225bf451a92e1f58a79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbbfcb66ecee1fe85ff7aaeed963365b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_748abc7165750444ffc532836ab28e45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ba8683fa6cc002524054b548eb2498e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d083c16e95aaee16bfc2ccf9f47d58e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f02e50d38506695a26126bb961dc418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3c2943f4cccdbb3d85eba90e8bf1cb1 |
| publicationDate |
2005-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005059787-A1 |
| titleOfInvention |
Synthesis of photoresist polymers |
| abstract |
The present invention is directed to the preparation of photoresist polymers via living free radical polymerization techniques. Sterically bulky ester monomers are utilized as the polymerization components. Use of chain transfer agents is included in polymerization processing conditions. Cleavage of polymer terminal end groups that include a heteroatom are described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007138139-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10990009-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009167812-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8376525-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233483-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8622523-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7445881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9696624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008261149-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7208334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7714316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007142592-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020506423-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021040253-A1 |
| priorityDate |
2003-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |