http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5861055-A

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
filingDate 1997-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bafd4b50e614e1125d0aef5a0c69a876
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publicationDate 1999-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5861055-A
titleOfInvention Polishing composition for CMP operations
abstract A polishing composition is shown which includes (1) a polishing media particle; (2) a film forming binder for suspending the particle and forming a temporary film on an exposed surface of the workpiece, the temporary film being dissolvable in a subsequently applied polishing wash, whereby the polishing media particle is freed to polish the workpiece; (3) a solvent for suspending the polishing media particle in the film forming binder to facilitate forming the temporary film; and (4) a wetting agent to improve the wettability of the composition on the exposed surface of the workpiece.
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