| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d1d01f6fc6a8e81cf60813f0693f6cb8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B55-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02 |
| filingDate |
2000-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e506d62169bdd907741985aea1d4709
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80738e17b493e8bd88438c6852efbd8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87abeca6a8944e5c0c283fb5677ff12e |
| publicationDate |
2001-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6258205-B1 |
| titleOfInvention |
Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material |
| abstract |
An apparatus for planarizing a semiconductor wafer having a polishing endpoint layer that includes a catalyst material is disclosed. The apparatus is operable to detect the endpoint based upon the chemical slurry whether a catalytic reaction has occurred due to the polishing platen removing a portion of the catalyst material from the wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171022-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6579800-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557132-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6866793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003213558-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111627829-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6716364-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6942546-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03074228-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004206374-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004030041-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6383332-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1366860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004060502-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004030041-A3 |
| priorityDate |
1998-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |