| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1472
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2003-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57499dea4a8015463a78a49f502ecff8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af4672f7ce34c085427262db520ac7f8 |
| publicationDate |
2004-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2004214443-A1 |
| titleOfInvention |
Silane containing polishing composition for CMP |
| abstract |
Polishing compositions comprising at least one soluble silane compound and at least one abrasive that are useful for polishing substrate surface features. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8778212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008318435-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007235684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8025811-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8426319-B2 |
| priorityDate |
2000-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |