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publicationDate 1998-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5817610-A
titleOfInvention Non-corrosive cleaning composition for removing plasma etching residues
abstract A non-corrosive cleaning composition for removing plasma etching residues comprising water, at least one quaternary ammonium hydroxide, and at least one corrosion inhibitor selected from (i) quaternary ammonium silicates and (ii) catechol nucleus-containing oligomers having a molecular weight in the range of about 220 to about 5,000.
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