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titleOfInvention Photosensitive resist remover compositions and methods
abstract COMPOSITIONS FOR REMOVING PHOTOSENSITIVE RESISTS FROM SILICON OR ALUMIMUN SUBSTRATES IN PHOTOLITHOGRAPHIC APPLICATION CONTAIN AN ARYLSULFONIC ACID (TOLUENESULFONIC ACID, XYLENESULFONIC ACID), A PHENOL(PHENOL,CRESOL, CHLOROPHENOL) EITHER ALONE OR WITH UP TO 75% BY WEIGHT OF THE TOTAL COMPOSITION OF A HALOGENATED DILUENT, (O-DICHLOROBENZENE, TETRACHLOROETHYLENE). AN ARYLSULFONIC ACID/ PHENOL RATIO OF ABOUT 1, WITH ABOUT 50% DIULENT, IS PREFERRED.
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