| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 |
| filingDate |
2005-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e9ce05ab2bb13fd3f691497586b6fff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4865151946cb04fd7ebc9519f67429f7 |
| publicationDate |
2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7879782-B2 |
| titleOfInvention |
Aqueous cleaning composition and method for using same |
| abstract |
An aqueous-based composition and method comprising same for removing residues such as without limitation post-ashed and/or post-etched photoresist from a substrate is described herein. In one aspect, there is provided a composition for removing residues comprising: water; at least one selected from a hydroxylamine, a hydroxylamine salt compound, and mixtures thereof; and a corrosion inhibitor wherein the composition is substantially free of an added organic solvent and provided that the corrosion inhibitor does not contain a water soluble organic acid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015111384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9256128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9436086-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8530356-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9245751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502231-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9460909-B2 |
| priorityDate |
2005-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |