| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0999625956ab5d9ed064aa6de5edd441 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
1998-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b3f2d28588c67d140adaf87f09e6e3e |
| publicationDate |
2002-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6432209-B2 |
| titleOfInvention |
Composition and method for removing resist and etching residues using hydroxylazmmonium carboxylates |
| abstract |
A mixture of hydroxylamine partially neutralized with a weak carboxylic acid and an organic solvent such as an alkyl sulfoxide, a pyrrolidinone or a sulfone removes hardened photoresist and polymeric photoresist residues from a substrate with reduced metal corrosion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03083582-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231281-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010112495-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008241758-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010086505-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007087948-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7879782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7976827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007243494-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6773873-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007026340-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003099908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7413848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005106492-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6878213-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8168577-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007003859-A1 |
| priorityDate |
1998-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |