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publicationNumber US-5763016-A
titleOfInvention Method of forming patterns in organic coatings films and layers
abstract Water-free, gaseous sulfur trioxide is used as an agent to form patterns in organic coatings, films, and layers, including photoresists, by etching areas exposed to the agent through an overlying mask or by developing a latent image of the desired pattern using the agent as a dry-developer.
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