patent/US-5037506-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5037506-A

Outgoing Links

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filingDate	1990-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1991-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a1e3efb922636fae67b1e822bec4e09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6bef5a644b936095399432f2a3f1892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3420d3277360fadfc9360b241602e9e2
publicationDate	1991-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5037506-A
titleOfInvention	Method of stripping layers of organic materials
abstract	Gaseous sulfur trioxide is used to remove various organic coatings, polymerized photoresist, and especially implant and deep-UV hardened photoresist layers, during the manufacture of semiconductor or ceramic devices.
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priorityDate	1990-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
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isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127900651 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453

Total number of triples: 93.