http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5554485-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S522-904
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
filingDate 1994-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1996-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90f95d279b581db0084d51fc6b6bc748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d29f26086ba4589c556af186b1107af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4fd8bac8a5e85b9d113827499ce08e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f1f9fb92a632ad6aa8e43c1dbcabb5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77959e72b17fadaeab58442930357df9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_754e110c546001e04081ac4ceab1d2e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac6a2eb1a7254465bb49c10bad9eb511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_999d12b466d3adf996aceb57279db5f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3ad8f53dc4f4dddedbbc0585544db85
publicationDate 1996-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5554485-A
titleOfInvention Mid and deep-UV antireflection coatings and methods for use thereof
abstract An antireflective coating composition for use with chemically amplified photoresist compositions comprising a polymer composition which is highly absorbent to mid and deep UV radiation, which is substantially inert to contact reactions with a chemically amplified photoresist composition, and which is insoluble in the developer for the chemically amplified photoresist composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7276327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6316160-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6316165-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6998206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7270931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6007963-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005078975-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6162577-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6455416-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6025117-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231736-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005221019-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6855466-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5989776-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6190955-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6015750-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003180634-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006058489-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03010601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6582861-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8344088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7722828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5986344-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6090722-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9069245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6576408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6808869-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7244334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0057247-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9069133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005250023-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004146790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6703169-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7682578-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6472333-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7682577-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100869484-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005196905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6931619-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1035442-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1035442-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678462-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6939661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005074689-A1
priorityDate 1992-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5126289-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4609614-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5234990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5057399-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4405707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4623609-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4782009-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4910122-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0159428-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4871646-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4587203-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5110697-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4592993-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4515886-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4822718-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5401614-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4644025-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0264650-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4008083-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4855199-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4758305-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4761464-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4491628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4137365-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4746596-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70700060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136047131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6627
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129351438
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID589711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128126239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127937391
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128043512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127513473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128857256
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3015642
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129703590
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129214490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128163661
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127622668
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129423316
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128450764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54347233
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8150
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128505507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127900651
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16883
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3095058
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70004
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54119248
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128585769
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3016901
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128612432
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79167

Total number of triples: 133.