http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6316160-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01e48e78fadaaec045333f9ad5a6e0b5
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D101-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D161-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D101-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D101-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08B15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-32
filingDate 2000-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2001-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3abc33d807b5251ddcadf0cc905a8c0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1accc7e814bd223484b62a7bf5dc4b25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c4dceee9a06ef2f71430de5e9a97bbd
publicationDate 2001-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6316160-B1
titleOfInvention Fast-etching, thermosetting anti-reflective coatings derived from cellulosic binders
abstract Anti-reflective compositions are prepared from cellulosic binders with improved etch rates
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006100116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004072420-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206680-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7163751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7008476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7456141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7846638-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7425399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007092746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004034148-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004209200-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6512084-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101676313-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992806-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012057751-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004088553-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101026127-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006290429-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004111092-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8344088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7582360-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7582220-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004253532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9069133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7038328-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678462-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544329-B2
priorityDate 1998-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5654376-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3661619-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4910122-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5382495-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5482817-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4133783-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0639641-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5401614-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3491037-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5688987-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5421618-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5094765-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4780228-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5578676-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5652297-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5554485-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5597868-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5234990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5674648-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5607824-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0542008-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4007144-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5294680-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5693691-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5641854-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5851738-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129687051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142521121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87059152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226416458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128562115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20702817
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453831981
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226473903
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5957728
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452801678
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20702818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449810960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449387917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142521118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25457
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127871042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127548820
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142372030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142521119
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7955
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128778198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20375126
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127597702
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226424859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127574734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID243062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127499362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127518173
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135883348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448969875
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16132304
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453623595
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7967
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412856
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7064
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415735353
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596525
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416055993
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53627474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73698653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70922
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226802939
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73698654
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128577468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73698655
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53249235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423865
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID102856
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157305207
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422939
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10708
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID242663236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424505117
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416011437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142373936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88213700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430895435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID233432515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226425025
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226441294
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1923
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128575486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127750531
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129967798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID59973239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22178470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420256138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128030073
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226889528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248750001
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405959
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127563749
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453744639
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86743108
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3085412
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226442429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903789
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12956798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22505845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226442430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129467351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248885042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449414442
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136258700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423055
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6880
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7360
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406017
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11728255
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406018
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31236
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID444539
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID103634
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19042644
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID561663
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16212087
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7103
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID577157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520672
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6971205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419489307
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128306163
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450984731
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405796
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128343003
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226414626
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8485
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5054
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409010033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408589047
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128644838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID521998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128101021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415809096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22052977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483880
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128400765
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393245
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410005185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420591870
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66586697
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453252172
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70211520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394458
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129051901
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226433383
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415873
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127447154
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17848643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID668171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457556906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420476276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226863005
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7900
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128630368
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395133
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25796
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226494041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415364
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447791005
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226412769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127450492
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405879
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID969516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450273274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226620291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405880
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419576644
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID785
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93374
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226440720
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547043
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142521120

Total number of triples: 280.