| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J3-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G75-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-3872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G83-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G75-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G83-00 |
| filingDate |
1993-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5713d98459c18123d17af04ab64199ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fad44953bddc7b625c915d7688e919e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50d2e3e77a3732486cea5f2bfa27b5e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53419252e2e9900d2db1650ff2ea2750 |
| publicationDate |
1996-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5578676-A |
| titleOfInvention |
Method for making polymers with intrinsic light-absorbing properties |
| abstract |
A composition and a method for forming an anti-reflective layer for DUV microlithographic processes is disclosed. The compositions of the present invention includes a polymer dissolved in a suitable solvent. The polymers are polysulfone and polyurea polymers which possess inherent light absorbing properties at deep ultraviolet wavelengths. In accordance with the method of the present invention, these compositions are applied to a substrate to form an anti-reflective coating, and thereafter a photoresist material that is compatible with the anti-reflective coating is applied. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6991893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9734948-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012004746-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012004744-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6004722-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6316160-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5693694-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1090332-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1556896-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1556896-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018167112-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6561640-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004086809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6576408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6225215-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6527867-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6536889-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1090332-A1 |
| priorityDate |
1992-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |