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filingDate 1994-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1996-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1996-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5547808-A
titleOfInvention Resist composition having a siloxane-bond structure
abstract The present invention provides a composition having sensitivity to light or radiation. The composition comprises a polymer having a siloxane-bond structure which undergoes polymerization reaction when irridiated with light or radiation, and a sensitizing agent. The present invention also provides a process for forming a pattern, preparing a photomask and a semiconductor device by using the composition of the present invention.
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