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publicationDate 1998-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5731126-A
titleOfInvention Chemically amplified positive resist compositions
abstract A chemically amplified positive resist composition comprising a specific polysiloxane having a terminal silanol group protected with a trimethylsilyl group, a photoacid generator and optionally a dissolution inhibitor is provided.
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