| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2000-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd23b1d95092db651b23ef43cae1fe47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3d17b3b234ed1afa3d09270b5937c01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88ee237348ddf794ea55454180289a13 |
| publicationDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6372406-B1 |
| titleOfInvention |
Deactivated aromatic amines as additives in acid-catalyzed resists |
| abstract |
Deactivated aromatic amines are useful to improve shelf life and performance of acid-catalyzed photoresist compositions without adverse interaction with radiation-sensitive acid generator components in said resist. The compositions are especially useful in photolithography processes used in forming integrated circuits and other miniaturized components. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009202941-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004170918-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7312014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524439-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11294278-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6949329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11173649-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003017425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11262650-B1 |
| priorityDate |
1998-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |