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filingDate 2017-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019161347-A1
titleOfInvention Method for manufacturing a micromechanical sensor
abstract A method for manufacturing a micromechanical sensor, including the steps: providing a MEMS wafer that includes a MEMS substrate, a defined number of etching trenches being formed in the MEMS substrate in a diaphragm area, the diaphragm area being formed in a first silicon layer that is situated at a defined distance from the MEMS substrate; providing a cap wafer; bonding the MEMS wafer to the cap wafer; and forming a media access point to the diaphragm area by grinding the MEMS substrate.
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priorityDate 2016-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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