http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021157246-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70466 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-70 |
| filingDate | 2020-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2a8b008e20478aec6b56ffdf952aa50 |
| publicationDate | 2021-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2021157246-A1 |
| titleOfInvention | Method for Manufacturing a Sensor Device |
| abstract | In an embodiment a method includes providing a substrate with an electrical functional layer comprising a plurality of functional regions, wherein the functional regions are electrically addressable independently from each other, wherein the plurality of functional regions comprises at least a first group of functional regions and a second group of functional regions, wherein the first group is different from the second group, and wherein at least one functional region is part of the first group and of the second group and performing a multiple-mask process by applying a first mask on the electrical functional layer, wherein the first mask exposes the functional regions of the first group and covers all other functional regions, applying a first sensor material over the exposed functional regions by sputtering, removing the first mask, applying a second mask on the electrical functional layer, wherein the second mask exposes the functional regions of the second group and covers all other functional regions, applying a second sensor material over the exposed functional regions by sputtering and/or performing a functionalizing treatment in the exposed functional regions and removing the second mask. |
| priorityDate | 2019-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.