| abstract |
The present invention relates to novel neutral layer compositions and methods for using the compositions. The neutral layer composition comprises at least one random copolymer having at least one unit of structure (1), at least one unit of structure (2) and at least one unit of structure (3) n n n n n n n n n n where R 1 is selected from the group consisting of a C 1 -C 8 alkyl, C 1 -C 8 fluoroalkyl moiety, C 1 -C 8 partially fluorinated alkyl, C 4 -C 8 cycloalkyl, C 4 -C 8 cyclofluoroalkyl, C 4 -C 8 partially fluorinated cycloalkyl, and a C 2 -C 8 hydroxyalkyl; R 2 , R 3 and R 5 are independently selected from a group consisting of H, C 1 -C 4 alkyl, CF 3 and F; R 4 is selected from the group consisting of H, C 1 -C 8 alkyl, C 1 -C 8 partially fluorinated alkyl and C 1 -C 8 fluoroalkyl, n ranges from 1 to 5, R 6 is selected from the group consisting of H, F, C 1 -C 8 alkyl and a C 1 -C 8 fluoroalkyl and m ranges from 1 to 3. |