Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-5446 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-54426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-5442 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F9-708 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-544 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
filingDate |
2015-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3fd31f7b3fa7061eb10eba4fe0cb26b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95f2be246e076610275b0ce57fb1538e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_def2faa6e3cf9d53edae1d26e4518d1a |
publicationDate |
2018-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-9941217-B2 |
titleOfInvention |
Mark, method for forming same, and exposure apparatus |
abstract |
A mark forming method includes: forming recessed portion on a mark formation area of a substrate; coating the recessed portion with a polymer layer containing a block copolymer; allowing the polymer layer in the recessed portion to form a self-assembled area; selectively removing a portion of the self-assembled area; and forming a positioning mark by using the self-assembled area from which the portion thereof has been removed. |
priorityDate |
2012-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |