http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9911621-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 2015-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac3e98539a33f08c4f7a03a128f35da2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d211ab554c944451c3a80b99c96af793 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d95f4e09a9d8191d685d104a90359924 |
| publicationDate | 2018-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-9911621-B2 |
| titleOfInvention | Method for processing target object |
| abstract | This method for processing a target object includes steps ST 1 to ST 4 . The target object has an organic polymer layer and a resist mask on a substrate. In step ST 1 , the target object is electrostatically attached to an electrostatic chuck in a plasma processing apparatus. In step ST 2 , the organic polymer layer is etched through the resist mask by means of a plasma of a first gas. In step ST 3 , the target object is detached from the electrostatic chuck while a plasma of a second gas is generated. In step 4 , the resist mask is peeled off. The second gas is either oxygen gas or a mixture of oxygen gas and a rare gas having an atomic weight lower than that of argon gas. |
| priorityDate | 2014-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.