| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd8317526535265948196ba60856c843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfccd7bff8c839ebb2254f67d9bf95bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38a06170e4bcab8f1bb2eba1584c569a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2007-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2121a65a16fbfee1841e6fa615496a23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a439fbd3386eb23127427c28aa6ae18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d2e58fb9e42b3c11bd1c11c77cab228 |
| publicationDate |
2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010028817-A1 |
| titleOfInvention |
Solution for treatment of resist substrate after development processing and method for treatment of resist substrate using the same |
| abstract |
The present invention provides a resist substrate-treating solution for improving defects on a developed pattern surface, and also provides a resist substrate treatment method employing the treating solution. The resist substrate-treating solution comprises a solvent and a nitrogen-containing or oxygen-containing water-soluble polymer such as a polyamine, a polyol or a polyether. In the treatment method, a developed resist pattern is treated with the resist substrate-treating solution and then washed with pure water. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9097977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8101333-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165523-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010021700-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3287697-A1 |
| priorityDate |
2006-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |