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publicationDate 2004-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004175942-A1
titleOfInvention Composition and method used for chemical mechanical planarization of metals
abstract Compositions for use in CMP processing and methods of CMP processing. The composition utilizes low levels of particulate material, in combination with at least one amino acid, at least one oxidizer, and water to remove a metal layer such as one containing copper to a stop layer with high selectivity.
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