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publicationDate 2003-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003166337-A1
titleOfInvention Chemical mechanical polishing systems and methods for their use
abstract Alpha-amino acid containing chemical mechanical polishing compositions and slurries that are useful for polishing substrates including multiple layers of metals, or metals and dielectrics.
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