| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2005-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b357185faff5ed8e12e0d6f83aa6991
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8875aa66aa47d266507a5d902aa49ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b27e8420239597de71ea0c645397a83e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_facd8643c08949f54bd4c28d8a345222 |
| publicationDate |
2006-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20060059216-A |
| titleOfInvention |
Metal polishing composition and polishing method using same |
| abstract |
The metal polishing composition contains at least one of a compound represented by formula (1) and a compound represented by formula (2) and an oxidizing agent, wherein the chemical mechanical polishing method is in contact with the surface to be polished. And a step of providing a relative motion between the surface to be polished and the surface to be polished. |
| priorityDate |
2004-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |