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filingDate 2018-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-11443943-B2
titleOfInvention Sputtering target, oxide semiconductor thin film, and method for producing these
abstract A sputtering target including an oxide that includes an indium (In) element, a tin (Sn) element, a zinc (Zn) element and an aluminum (Al) element, wherein the oxide includes a homologous structure compound represented by InAlO3(ZnO)m (m is 0.1 to 10) and a bixbyite structure compound represented by In2O3.
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