| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0132 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2019-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_606ea64142da772b4441f4c7b3ae014a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31398b72ac3ac0b2f20b5ada97e00a9f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63ba1d1c4256961005bf8db5c69330ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc01c2f7c520b0870196f58b6438dafb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edfaeb5772d0b40dbe14f1ef5faf17cc |
| publicationDate |
2021-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11086223-B2 |
| titleOfInvention |
Hardmask composition and method of forming pattern using the hardmask composition |
| abstract |
A hardmask composition may include graphene nanoparticles having a size in a range of about 5 nm to about 100 nm and a solvent. |
| priorityDate |
2015-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |