Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38e74915e37e73ac7e6f9fcfad28d123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e00bf5d5d26925d7d9774e783ae245ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_46400976afa9fa473cc090a4e2b97a69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_730848fc69ca7afca2b3c3e10b6cfd92 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y30-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 |
filingDate |
2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de49fde78609e047423fac9961b2e9ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b335f7561ba2249895f6aae5c12893 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60c77508221cd9762905fefaf1c799f4 |
publicationDate |
2013-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2013105440-A1 |
titleOfInvention |
Nanocomposite negative photosensitive composition and use thereof |
abstract |
The present invention relates to a negative photosensitive composition suitable for image-wise exposure and development as a negative photoresist comprising a negative photoresist composition and an inorganic particle material having an average particle size equal or greater than 10 nanometers, wherein the thickness of the photoresist coating film is less than 5 microns. The negative photoresist composition is selected from (1) a composition comprising (i) a resin binder, (ii) a photoacid generator, and (iii) a cross-linking agent; or (2) a composition comprising (i) a resin binder, (ii) optionally, addition-polymerizeable, ethylenically unsaturated compound(s) and (iii) a photoinitiator; or (3) a composition comprising (i) a photopolymerizable compound containing at least two pendant unsaturated groups; (ii) ethylenically unsaturated photopolymerizable polyalkylene oxide hydrophilic compound(s); and (iii) a photoinitiator. The invention also relates to a process of forming an image using the novel photosensitive composition. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021278766-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10108089-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11320736-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10331033-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019204727-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021373687-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11086223-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10495972-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016011506-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11188185-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016011511-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018364572-A1 |
priorityDate |
2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |