| abstract |
The resist composition according to the present invention includes a compound represented by a specific formula. The above compound has a low molecular weight, has a high heat resistance due to its high aromatic skeleton, and can also be used under high-temperature baking conditions. As described above, the resist composition according to the present invention has excellent heat resistance, high solubility in safety solvents, high sensitivity, and a favorable resist pattern shape. That is, the resist composition according to the present invention is useful as an acid amplification type non-polymeric resist material. |