http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130010857-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
filingDate 2012-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
publicationDate 2013-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20130010857-A
titleOfInvention Resist composition and method for producing resist pattern
abstract The present invention relates to a resin having a structural unit represented by the formula (I), a resin which is insoluble or hardly soluble in an aqueous alkali solution but soluble in an alkali aqueous solution by the action of an acid and does not contain a structural unit represented by the formula (I) An acid generator and a compound represented by the formula (II). (Wherein R 1 , A 1 , A 13 , A 14 , X 12 , R 23 and ring W 21 are defined in the specification)
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220108790-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210096190-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140137925-A
priorityDate 2011-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011034176-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001055373-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010197413-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110033794-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004151159-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID32484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415841400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523993
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78202
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54156769
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16215
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393630
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416035419
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13998878
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21889507
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID526990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID64151
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8102
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410480387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420921313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426032825
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499870
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID604650
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415836792
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457203572
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID305
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450269560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424667526
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14227
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419769253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415771861
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID5476
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448243148
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426012389
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9238
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456464034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523820
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222708
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457285460
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447828248
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8127
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57204623
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449892084
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4413513
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4426313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410534197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4046709
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2760772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578055
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422975274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415994933
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412223788
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457311558
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419489418
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419599320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31255
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393376
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8143
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139145
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414872907
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419574858
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11098
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410570838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13140
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457283974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12133
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524931
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415756930
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448389239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456371369
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410389413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21954569
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410569365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415764662
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137295
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419477836
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394891
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID181127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414875087
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7934
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457673796
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457169682
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415766163
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID5476
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12138
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13195
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413422671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426033544
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415882760
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419604661
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81061
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419589952
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14029868
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415835521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12348
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8916
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415790169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456371964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454332514
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137733
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410578038
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81746
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414870334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410506846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413958311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410578104
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457284312
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78630
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416053110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10994503
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13583
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450067302
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5162451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457311559
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712177
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545183
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67940
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420378050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161991086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393749
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16316
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420233562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456357899
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426060759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583797
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863633
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393730
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91537
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78207
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413923119
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27596
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410536702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409686315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410535383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID644017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419543712
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6344

Total number of triples: 208.